| File Format | Extensions | Module | Read | Write | SPS |
|---|---|---|---|---|---|
| AIST-NT | .aist | aistfile | Yes | No | No |
| Alicona Imaging AL3D data | .al3d | alicona | Yes | No | No |
| Ambios AMB | .amb | ambfile | Yes | No | No |
| Anfatec | .par, .int | anfatec | Yes | No | No |
| APE Research DAT | .dat | apefile | Yes | No | No |
| Text matrix of data values | .txt | asciiexport | No | Yes | No |
| Assing AFM | .afm | assing-afm | Yes | Yes | No |
| Attocube Systems ASC | .asc | attocube | Yes | No | No |
| Image Metrology BCR, BCRF | .bcr, .bcrf | bcrfile | Yes | No | No |
| Burleigh IMG v2.1 | .img | burleigh | Yes | No | No |
| Burleigh BII | .bii | burleigh_bii | Yes | No | No |
| Burleigh exported data | .txt, .bin | burleigh_exp | Yes | No | No |
| Code V interferogram data | .int | codevfile | Yes | No | No |
| Createc DAT | .dat | createc | Yes | No | No |
| Benyuan CSM | .csm | csmfile | Yes | No | No |
| DME Rasterscope | .img | dmefile | Yes | No | No |
| Gwyddion dumb dump data | .dump | dumbfile | Yes | No | No |
| ECS | .img | ecsfile | Yes | No | No |
| Nanosurf EZD, NID | .ezd, .nid | ezdfile | Yes | No | No |
| DME GDEF | .gdf | gdeffile | Yes | No | No |
| Gwyddion Simple Field | .gsf | gsffile | Yes | Yes | No |
| Gwyddion native data | .gwy | gwyfile | Yes | Yes | Yes |
| Psi HDF4 | .hdf | hdf4file | Yes | No | No |
| Hitachi AFM | .afm | hitachi-afm | Yes | No | No |
| Hitachi S-3700 and S-4800 SEM data | .txt, +, image | hitachi-sem | Yes | No | No |
| WaveMetrics IGOR binary wave v5 | .ibw | igorfile | Yes | No | No |
| Intematix SDF | .sdf | intematix | Yes | No | No |
| ISO 28600:2011 SPM data transfer format | .spm | iso28600 | Yes | Yes | Limited[a] |
| JEOL | .tif | jeol | Yes | No | No |
| JPK Instruments | .jpk | jpkscan | Yes | No | No |
| Olympus LEXT 4000 | .lext | lextfile | Yes | No | No |
| MapVue | .map | mapvue | Yes | No | No |
| Zygo MetroPro DAT | .dat | metropro | Yes | No | No |
| MicroProf TXT | .txt | microprof | Yes | No | No |
| MicroProf FRT | .frt | microprof | Yes | No | No |
| DME MIF | .mif | miffile | Yes | No | No |
| Molecular Imaging MI | .mi | mifile | Yes | No | Limited[a] |
| Aarhus MUL | .mul | mulfile | Yes | No | No |
| Nanoeducator | .mspm, .stm, .spm | nanoeducator | Yes | No | Yes |
| Nanonics NAN | .nan | nanonics | Yes | No | No |
| Nanonis SXM | .sxm | nanonis | Yes | No | No |
| Nanoscan XML | .xml | nanoscan | Yes | No | No |
| Veeco Nanoscope II | .001, .002, etc. | nanoscope-ii | Yes | No | No |
| Veeco Nanoscope III | .001, .002, etc. | nanoscope | Yes | No | Limited[a] |
| Nanotop SPM | .spm | nanotop | Yes | No | No |
| GSXM NetCDF | .nc | netcdf | Yes | No | No |
| Nearly raw raster data (NRRD) | .nrrd | nrrdfile | Yes[b] | Yes[c] | No |
| NT-MDT | .mdt | nt-mdt | Yes | No | Yes |
| Olympus LEXT 3000 | .ols | ols | Yes | No | No |
| Omicron SCALA | .par, .tf*, .tb*, .sf*, .sb* | omicron | Yes | No | Yes |
| Omicron flat format | .*_flat | omicronflat | Yes | No | No |
| Omicron MATRIX | .mtrx | omicronmatrix | Yes | No | No |
| Wyko OPD | .opd | opdfile | Yes | No | No |
| Wyko ASCII | .asc | opdfile | Yes | No | No |
| Pixmap images | .png, .jpeg, .tiff, .tga, .pnm, .bmp | pixmap | Yes[d] | Yes[e] | No |
| Nanosurf PLT | .plt | pltfile | Yes | No | No |
| Pacific Nanotechnology PNI | .pni | pnifile | Yes | No | No |
| Park Systems | .tiff,, .tif | psia | Yes | No | No |
| SymPhoTime TTTR v2.0 data | .pt3 | pt3file | Yes | No | No |
| Quesant AFM | .afm | quesant | Yes | No | No |
| Raw text files | any | rawfile | Yes | No | No |
| Raw binary files | any | rawfile | Yes | No | No |
| Graph text data (raw) | any | rawgraph | Yes[f] | No | No |
| XYZ data | .xyz, .dat | rawxyz | Yes[g] | No | No |
| RHK Instruments SM3 | .sm3 | rhk-sm3 | Yes | No | Limited[a] |
| RHK Instruments SM4 | .sm4 | rhk-sm4 | Yes | No | Limited[a] |
| RHK Instruments SM2 | .sm2 | rhk-spm32 | Yes | No | Limited[a] |
| Automation and Robotics Dual Lens Mapper | .mcr, .mct, .mce | robotics | Yes | No | No |
| Surfstand Surface Data File | .sdf | sdfile | Yes | Yes | No |
| Micromap SDFA | .sdfa | sdfile | Yes | No | No |
| Seiko SII | .xqb, .xqd, .xqt | seiko | Yes | No | No |
| Sensofar PLu v2000 | .plu | sensofar | Yes | No | No |
| Sensolytics DAT | .dat | sensolytics | Yes | No | No |
| Shimadzu | shimadzu | Yes | No | No | |
| IonScope SICM | .img | sicmfile | Yes | No | No |
| Surface Imaging Systems | .sis | sis | Yes | No | No |
| SPIP ASCII | .asc | spip-asc | Yes | No | No |
| SPML (Scanning Probe Microscopy Markup Language) | .xml | spml | Yes | No | No |
| Thermicroscopes SPMLab R4-R7 | .tfr, .ffr, etc. | spmlab | Yes | No | No |
| Thermicroscopes SPMLab floating point | .flt | spmlabf | Yes | No | No |
| Omicron STMPRG | tp*, ta* | stmprg | Yes | No | No |
| Molecular Imaging STP | .stp | stpfile | Yes | No | No |
| Surf | .sur | surffile | Yes | No | No |
| Unisoku | .hdr, .dat | unisoku | Yes | No | No |
| WIPfile | .wip | wipfile | Yes | No | Yes |
| WITec ASCII export | .dat | witec-asc | Yes | No | No |
| WITec | .wit | witfile | Yes | No | No |
| WSF ASCII data | .wsf | wsffile | Yes | No | No |
| Nanotec WSxM | .tom | wsxmfile | Yes | No | No |
| Carl Zeiss SEM scans | .tif | zeiss | Yes | No | No |
[a] Spectra curves are imported as graphs, positional information is lost. [b] Not all variants are implemented. [c] Data are exported in a fixed attached native-endian float point format. [d] Import support relies on Gdk-Pixbuf and hence may vary among systems. [e] Usually lossy, intended for presentational purposes. 16bit grayscale export is possible to PNG, TIFF and PNM. [f] At present, only simple two-column data, imported as graph curves, are supported. [g] XYZ data are interpolated to a regular grid upon import. | |||||